Reticle-carrying container
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United States of America Patent
Stats
-
Nov 11, 2008
Grant Date -
May 25, 2006
app pub date -
Nov 21, 2005
filing date -
Nov 24, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention supports a reticle 12 in a safe and secure manner. A reticle-carrying container 11 includes a pod 13 for storing the reticle 12, a door 14 and a seal 15 for blocking and sealing hermetically the pod 13. A pair of reticle retainers 25 and 45 is provided on the insides of the pod 13 and door 14. Each of the reticle retainers 25 and 45 includes an inclined plane 28 that contacts an upper corner 12A or a lower corner 12B of peripheral edge of the reticle 12 and supports the reticle 12 elastically. The inside of the inclined plane 28 is provided with concave portions 31 and 52 that enables a shock-absorbing function of allowing the deformation of the inclined plane 28 and supporting the reticle elastically, at the time of contact with the upper corner 12A or the lower corner 12B of peripheral edge of the reticle 12.
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