Ion beam irradiation apparatus
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United States of America Patent
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-
Oct 21, 2008
Grant Date -
Dec 28, 2006
app pub date -
May 8, 2006
filing date -
May 24, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Three axes that are orthogonal to each other at one point are taken as an X-axis, a Y-axis and a Z-axis. An irradiation angle setting motor holds a holder, and sets an irradiation angle .theta. of an ion beam by rotating this holder around a center axis that is parallel to the X-axis. A Y-axis linear motor causes the holder and the irradiation angle setting motor to ascend and descent in the direction of the Y-axis. A Z-axis linear motor moves the holder, the irradiation angle setting motor and the Y-axis linear motor in the direction of the Z-axis. A control unit operation-controls synchronously the Y-axis linear motor and the Z-axis linear motor so that a substrate holding surface of the holder reciprocates and scans linearly along an S-axis that is parallel to the substrate holding surface and orthogonal to the X-axis.
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