Wide range pressure control using turbo pump
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United States of America Patent
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Oct 21, 2008
Grant Date -
Apr 12, 2007
app pub date -
Oct 7, 2005
filing date -
Oct 7, 2005
priority date (Note) -
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Abstract
The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressure and flow rate. A backing valve downstream of the pump is also controlled to maintain the setting of the throttle valve within a preferred, stable operating range.
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