Probe repair methods
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United States of America Patent
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-
Oct 21, 2008
Grant Date -
Aug 30, 2007
app pub date -
Feb 7, 2007
filing date -
Feb 8, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
A method and apparatus for repairing a probe on a probe card is provided. A plurality of beams is formed on a beam panel. The plurality of beams includes a replacement beam. After identifying a damaged beam on the probe card, the damaged beam is removed from the probe card. The beam panel is aligned with the probe card. After the beam panel is aligned, the aligned beam panel is temporarily affixed to the probe card. After the beam panel is temporarily affixed to the probe card, the replacement beam is affixed at a location previously occupied by the damaged beam. After the replacement beam is affixed at the location, the beam panel is removed from the probe card.
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