SAW temperature sensor and system
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United States of America Patent
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Oct 14, 2008
Grant Date -
Mar 22, 2007
app pub date -
Sep 7, 2006
filing date -
Sep 7, 2005
priority date (Note) -
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Abstract
A temperature measurement system is characterized by at least one passive surface acoustic wave (SAW) temperature sensor. The sensor includes at least one piezoelectric substrate having an interdigital SAW transducer disposed upon the piezoelectric substrate for conversion of an RF signal into an acoustic wave and vice versa. At least three additional SAW elements are also disposed on the substrates in a manner such that they define two acoustic propagation paths that are non-parallel relative to the crystal axes of the substrates, and such that the temperature coefficients of delay in the two tracks differ. The SAW elements receive a signal from the SAW transducer and produce response signals. The response signals combine to produce a signal with a power spectral density such that the integrated power within each of two specified portions of the spectrum provides an indicator of the temperature. This change in the power spectral density of the sensor response signal is measured by an interrogator, and yields a measure of the temperature of the sensor.
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