Apparatus for determining cantilever parameters
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United States of America Patent
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Oct 14, 2008
Grant Date -
Mar 22, 2007
app pub date -
Jun 26, 2006
filing date -
Feb 28, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Apparatus for determining physical properties of micromachined cantilevers used in cantilever-based instruments, including atomic force microscopes, molecular force probe instruments and chemical or biological sensing probes. The properties that may be so determined include optical lever sensitivity, cantilever spring constant and cantilever sample separation. Cantilevers characterized with the method may be used to determine fluid flow rates. The apparatus measures cantilever deflection resulting from drag force as the cantilever is moved through fluid. Unlike other methods for determining such physical properties of cantilevers, the method described does not depend on cantilever contact with a well-defined rigid surface. Consequently, the apparatus may be employed in situations where such contact is undesirable or inconvenient. The apparatus may be used for applications such as molecular force measurements, atomic force microscopy and manipulation technology, chemical or biological sensing, nanometer scale surface profiling, and other aspects of nanotechnology.
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