Multi-axis interferometer with procedure and data processing for mirror mapping

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United States of America Patent

PATENT NO 7433049
APP PUB NO 20060215173A1
SERIAL NO

11378013

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In general, in one aspect, the invention features methods that include locating a plurality of alignment marks on a moveable stage, interferometrically measuring a position of a measurement object along an interferometer axis for each of the alignment mark locations, and using the interferometric position measurements to derive information about a surface figure of the measurement object. The position of the measurement object is measured using an interferometry assembly and either the measurement object or the interferometry assembly are attached to the stage.

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Patent Owner(s)

  • ZYGO CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hill, Henry A Tucson, AZ 108 2541
Womack, Gary Tucson, AZ 12 23

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges24385163822727898531401 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0255075100125150175200225250275300325350375400425

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