Multi-axis interferometer with procedure and data processing for mirror mapping
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United States of America Patent
Stats
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Oct 7, 2008
Grant Date -
Sep 28, 2006
app pub date -
Mar 17, 2006
filing date -
Mar 18, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In general, in one aspect, the invention features methods that include locating a plurality of alignment marks on a moveable stage, interferometrically measuring a position of a measurement object along an interferometer axis for each of the alignment mark locations, and using the interferometric position measurements to derive information about a surface figure of the measurement object. The position of the measurement object is measured using an interferometry assembly and either the measurement object or the interferometry assembly are attached to the stage.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- ZYGO CORPORATION
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Hill, Henry A | Tucson, AZ | 108 | 2541 |
# of filed Patents : 108 Total Citations : 2541 | |||
Womack, Gary | Tucson, AZ | 12 | 23 |
# of filed Patents : 12 Total Citations : 23 |
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- G01B Class
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- 17 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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Jan 24, 2017 | I | Issuance | |
Jan 04, 2017 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Nov 10, 2015 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:MILLENNIUM MARKING COMPANY;REEL/FRAME:039086/0326 Owner name: TRODAT GMBH, AUSTRIA Effective Date: Nov 10, 2015 |
Apr 10, 2014 | P | Published | |
Oct 05, 2012 | F | Filing | |
Oct 05, 2012 | PD | Priority Date | |
Oct 04, 2012 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:PETERSEN, CRAIG J.;REEL/FRAME:029460/0857 Owner name: MILLENNIUM MARKING COMPANY, ILLINOIS Effective Date: Oct 04, 2012 |

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