Tri-axis accelerometer
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United States of America Patent
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Oct 7, 2008
Grant Date -
May 31, 2007
app pub date -
Nov 16, 2006
filing date -
Nov 22, 2005
priority date (Note) -
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Abstract
In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor.
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