Circuit-pattern inspecting apparatus and method
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United States of America Patent
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Sep 9, 2008
Grant Date -
Aug 30, 2007
app pub date -
Jan 29, 2007
filing date -
Feb 28, 2006
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A circuit pattern inspection apparatus and inspection method facilitate the creation of a recipe and the confirmation of a defect. The apparatus and method employ a dialogue-based operation for the creation of a recipe and the confirmation of a defect. Input items (such as contrast, calibration, etc.) for the recipe creation and their purposes are clarified. Input items (such as clustering, filtering, etc.) for the defect confirmation and their purposes are also clarified. The results obtained on the basis of these inputs are registered in the recipe.
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