Method and system for providing a smaller critical dimension magnetic element utilizing a single layer mask
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United States of America Patent
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Sep 2, 2008
Grant Date -
N/A
app pub date -
Feb 13, 2006
filing date -
Feb 13, 2006
priority date (Note) -
Expired
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Abstract
The method and system for providing a magnetic element are disclosed. The method and system include providing a magnetic element stack that includes a plurality of layers and depositing a stop layer on the magnetic element stack. The method and system also include providing a dielectric antireflective coating (DARC) layer on the stop layer, forming a single layer mask for defining the magnetic element on a portion of the DARC layer, and removing a remaining portion of the DARC layer not covered by the single layer mask. The portion of the DARC layer covers a portion of the stop layer. The method further includes removing a remaining portion of the stop layer and defining the magnetic element using at least the portion of stop layer as a mask.
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