System and method for controlling light scattered from a workpiece surface in a surface inspection system
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United States of America Patent
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Aug 26, 2008
Grant Date -
Aug 24, 2006
app pub date -
Dec 17, 2005
filing date -
Dec 19, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features masking positioned in the collection and detection subsystem arranged to selectively prevent a portion of scattered light from passing through. Also included is a scatter absorbing system having a series of scatter absorbing elements for minimizing unrelated to the scatter associated with a desired location on the surface.
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