Process module tuning
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United States of America Patent
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Aug 19, 2008
Grant Date -
Dec 1, 2005
app pub date -
May 26, 2004
filing date -
May 25, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process module tuning method characterizes a process module by gathering data using a process condition measuring device to measure process outputs while inputs are excited. The data is used to identify a dynamic process model. The dynamic process model is then be used to determine process input settings that will produce desired outputs. For multi-zone process modules, the interactions between zones may be modeled.
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