Method and apparatus for manufacturing nitrogen trifluoride
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United States of America Patent
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Aug 19, 2008
Grant Date -
Feb 8, 2007
app pub date -
Aug 4, 2005
filing date -
Aug 4, 2005
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Abstract
A method and apparatus for manufacture of NF.sub.3 by gas-liquid phase reaction of fluorine and ammonia in molten ammonium acid fluoride (AAF) in a static reactor in which the reactants are conveyed primarily by thermal conduction or siphon. Optimally, the reactor contains one or more static mixing elements with little, if any, mechanical agitation. Reactant flow rate and reaction temperature are regulated by the rate of introduction of ammonia and cooling, as necessary The ratio of hydrogen fluoride (generated by the reaction) to ammonia in the reactor is significantly lower than taught in the prior art. This allows a lower reaction temperature. The present invention is an improved synthetic method that offers enhanced selectivity and higher yields, improved control of reaction kinetics, reduced operational and energy costs, and a greater margin of safety.
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