Importance

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Abstract

A vacuum valve comprises a valve housing which has an inlet opening and an outlet opening, a valve disk which is located in the interior space of the valve housing and which is arranged at a carrying arm that is rigidly connected to a shaft which, for purposes of opening and closing the vacuum valve, is rotatable around its longitudinal axis and displaceable in axial direction, and a driving device for opening and closing the vacuum valve. The driving device comprises a rotary drive for rotating the shaft. The driving device further comprises a driving piston which is arranged in an inner cavity of the valve disk and which has, at least over portions of its circumference, a radial extension which is larger than the outlet opening with respect to the center longitudinal axis of the outlet opening and at which tappets are arranged on the side facing the outlet opening. The tappets are guided out of the inner cavity of the valve disk and are supported in the closed position of the valve disk at the valve housing in the area next to the outlet opening and press the valve disk against the valve seat and can be lifted from the valve housing for displacing the valve disk from its closed position into its intermediate position by means of a displacement of the driving piston. At least one spring element displaces the valve disk into its intermediate position by an axial displacement of the shaft.

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First Claim