Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers
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United States of America Patent
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Aug 12, 2008
Grant Date -
Jan 25, 2007
app pub date -
Jun 19, 2006
filing date -
Jun 19, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.
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