Stamp for use in a lithographic process, method of manufacturing a stamp, and method of manufacturing a patterned layer on a substrate
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Aug 12, 2008
Grant Date -
Oct 4, 2001
app pub date -
Jan 12, 2001
filing date -
Feb 7, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The stamp (10) for a lithographic process, such as patterning a surface layer, of the invention has a stamp body (5) with at least a first recess (11) formed therein, which recess defines a first aperture (15) in the printing face (3) of the stamp (10). The first recess (11) narrows with increasing distance to the printing face, while any cross-section of the first recess, when perpendicularly projected on the printing face (3), will lie within the aperture (15). The printing face may comprise small (11, 12) and large apertures (13) as well as small surfaces (14) in between apertures, while it is nevertheless able to produce prints which are accurate replicas of the printing face. Even details on a submicron scale can be adequately printed. The stamp (10) can be manufactured by a method which comprises anisotropic etching of a first body to make a mold and replicating the mold in the printing face (3) of the stamp (10).
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
U S PHILIPS CORPORATION | 1251 AVENUE OF THE AMERICAS NEW YORK NY 10020 |
International Classification(s)

- 2001 Application Filing Year
- H01L Class
- 12651 Applications Filed
- 6832 Patents Issued To-Date
- 54.01 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Blees, Martin Hillebrand | Eindhoven, NL | 11 | 119 |
# of filed Patents : 11 Total Citations : 119 |
Cited Art Landscape
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Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 17 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
Date | Code | Event | Description |
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Aug 11, 2014 | STCH | INFORMATION ON STATUS: PATENT DISCONTINUATION | free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
Jul 16, 2014 | FP | EXPIRED DUE TO FAILURE TO PAY MAINTENANCE FEE | Effective Date: Jul 16, 2014 |
Jul 16, 2014 | LAPS | LAPSE FOR FAILURE TO PAY MAINTENANCE FEES | |
Feb 21, 2014 | REMI | MAINTENANCE FEE REMINDER MAILED | |
Dec 30, 2009 | FPAY | FEE PAYMENT | year of fee payment: 8 |
Jan 13, 2006 | FPAY | FEE PAYMENT | year of fee payment: 4 |
Jul 16, 2002 | I | Issuance | |
Jan 21, 2000 | F | Filing | |
Jan 11, 2000 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KISHIKI, KIYOSHI;TORIKAI, YUKIO;YAMASHITA, TOSHIHIKO;AND OTHERS;REEL/FRAME:010529/0493 Owner name: NEW JAPAN RADIO CO., LTD, JAPAN Effective Date: Jan 11, 2000 |
Feb 10, 1999 | PD | Priority Date |

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