Capacitor compatible with high dielectric constant materials having a low contact resistance layer and the method for forming same
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United States of America Patent
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Jul 22, 2008
Grant Date -
Jan 5, 2006
app pub date -
Aug 30, 2005
filing date -
Apr 2, 1993
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Abstract
A storage cell capacitor and a method for forming the storage cell capacitor having a storage node electrode including a barrier layer interposed between a conductive plug and an oxidation resistant layer. A layer of titanium silicide is fabricated to lie between the conductive plug and the oxidation resistant layer. An insulative layer protects the sidewalls of the barrier layer during the deposition and anneal of a dielectric layer having a high dielectric constant.
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