Decoupled stacked bulk acoustic resonator band-pass filter with controllable pass bandwith
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United States of America Patent
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Jul 15, 2008
Grant Date -
May 5, 2005
app pub date -
Oct 13, 2004
filing date -
Oct 30, 2003
priority date (Note) -
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Abstract
The band-pass filter has an upper film bulk acoustic resonator (FBAR), an upper FBAR stacked on the lower FBAR, and, between the FBARs, an acoustic decoupler comprising a layer of acoustic decoupling material. Each of the FBARs has opposed planar electrodes and a piezoelectric element between the electrodes. The acoustic decoupler controls the coupling of acoustic energy between the FBARs. Specifically, the acoustic decoupler couples less acoustic energy between the FBARs than would be coupled by direct contact between the FBARs. The reduced acoustic coupling gives the band-pass filter desirable in-band and out-of-band properties.
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