Semiconductor integrated circuit device and a method of manufacturing the same
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United States of America Patent
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Jul 8, 2008
Grant Date -
Aug 19, 2004
app pub date -
Feb 17, 2004
filing date -
Mar 3, 1999
priority date (Note) -
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Abstract
A semiconductor integrated circuit device is provided which includes an active region, a shallow groove isolation adjacent to the active region, and a semiconductor element formed in the active region and having a gate. The sum of a width of the active region and a width of the shallow groove isolation constitutes a minimum pitch in the direction of a gate width of the gate, and the width of the active region is set larger than one-half of the minimum pitch.
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