Sulfonium salts
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United States of America Patent
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Jul 8, 2008
Grant Date -
Sep 20, 2007
app pub date -
Mar 15, 2007
filing date -
Mar 16, 2006
priority date (Note) -
Expired
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Abstract
The present invention provides a sulfonium salt which can serve as a photo-acid-generator, the sulfonium salt not raising the problem of poor compatibility to a photoresist polymer having an acid-dissociable group. The sulfonium salt is represented by formula (1): ##STR00001## wherein R.sub.1 represents a linear or branched C2 to C9 divalent hydrocarbon group; each of R.sub.2 to R.sub.5 represents a hydrogen atom or a linear or branched C1 to C3 hydrocarbon group; each of R.sub.6 and R.sub.7 represents an organic group; R.sub.6 and R.sub.7 may be linked together to form a divalent organic group; and X.sup.- represents an anion.
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