Embedded piezoelectric microcantilever sensors
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United States of America Patent
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Jul 8, 2008
Grant Date -
May 31, 2007
app pub date -
Jan 24, 2007
filing date -
Dec 2, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus and method for sensing chemical and/or biological analytes includes a deflectable arm of a microcantilever at least partially embedded within a sensing element. A gaseous or liquid medium which may include the analyte being detected is introduced to the sensing element. The sensing element undergoes volumetric expansion or contraction in the presence of the analyte sought to be detected, typically by adsorbing the analyte. The volumetric change of the sensing element causes the deflectable arm to deflect. The deflectable arm includes at least one measurable physical property which changes when the arm deflects. Detecting means are provided to measure the change in the physical property to determine the presence and amount of analyte present. An array of microcantilevers in which each microcantilever is dedicated to detecting a particular analyte which may be included in the medium, is also provided.
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