Method of generating image and illumination device for inspecting substrate
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United States of America Patent
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Jul 1, 2008
Grant Date -
Jan 5, 2006
app pub date -
Jun 20, 2005
filing date -
Jun 30, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
For generating an image for inspection of a substrate, a camera is provided above this substrate with an optical axis orienting downward and a plurality of multi-colored light emitting members are set around the optical axis of the camera so as to be within a specified angular range with respect to a target area on the substrate. The camera is operated to generate an image of the target area for inspection while switched-on conditions of these light emitting members are being controlled such that the colors and angles of light illuminating this target area are varied according to a specified kind of the purpose of this inspection.
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