High performance sol-gel spin-on glass materials
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United States of America Patent
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Jul 1, 2008
Grant Date -
Feb 3, 2005
app pub date -
Jul 31, 2003
filing date -
Jul 31, 2003
priority date (Note) -
Expired
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Abstract
Hybrid sol-gel materials are provided, which may be produced by the reaction of an alkyl or dialkyl substituted trialkoxysilane or dialkoxysilane reacting with a silane diol, wherein said alkyl group has from 1 to 8 carbon atoms. A process is also provided for patterning the sol-gel spin-on glass material by: a) coating a substrate with the spin-on glass material; b) exposing the coated substrate of step a) to UV illumination in a desired pattern; c) post-exposure baking the coated substrate of step b) at a temperature from 100.degree. C. to 120.degree. C. for 30 to 60 minutes; d) cooling the coated substrate of step c) to room temperature; e) removing the non-exposed areas of the coating on the coated substrate of step d); f) drying the coated substrate of step e); g) hard baking the coated substrate of step f) at a temperature from 120.degree. C. and 150.degree. C. for 1 to 3 hours.
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