Acoustic resonator performance enhancement using alternating frame structure
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United States of America Patent
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Jun 17, 2008
Grant Date -
Apr 6, 2006
app pub date -
Jun 23, 2005
filing date -
Oct 1, 2004
priority date (Note) -
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Abstract
Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The alternating frame region is on one of the first and second electrodes.
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