Probe manufacturing method, probe, and scanning probe microscope
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United States of America Patent
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Jun 17, 2008
Grant Date -
Dec 21, 2006
app pub date -
Sep 3, 2004
filing date -
Sep 3, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A probe is made by attaching a carbon nanotube 12 to a mounting base end 13, which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nanotube and the base with a coating film, rather than coating just one side. The work of mounting the carbon nanotube and mounting base end are performed under observation by a microscope. Further, the carbon contamination film 14 formed by an electron microscope is stripped off at a stage before bonding by the coating film.
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