Mems mirror array and controls
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United States of America Patent
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Jun 10, 2008
Grant Date -
N/A
app pub date -
Mar 26, 2007
filing date -
Mar 26, 2007
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A MEMS mirror array in which the MEMS mirrors are driven in two axes by vertical comb drive actuators. Tortional elements with conductive comb fingers are utilized to provide the two axis actuation. A MEMS mirror control system supplies electrical voltage potentials between inside pivoting support frame conductive comb fingers and mirror frame conductive comb fingers and supplies electrical voltage potentials between MEMS mirror array support frame conductive comb fingers and outside pivoting support frame conductive comb fingers. In preferred embodiments two MEMS mirror arrays are utilized to provide beam direction in a cross connect switch.
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