Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure
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United States of America Patent
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Jun 10, 2008
Grant Date -
Dec 22, 2005
app pub date -
Jun 10, 2005
filing date -
Jun 11, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Test sound wave is outputted from a speaker. A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker, that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via a probe needles. A control part determines the property of the three-axis acceleration sensor on the basis of the measured property values, that is, measured data.
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