Antihalation compositions

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United States of America Patent

PATENT NO 7378222
APP PUB NO 20060110682A1
SERIAL NO

11328928

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.

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Patent Owner(s)

Patent OwnerAddress
SHIPLEY COMPANY L L CMARLBOROUGH MA

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Orsula, George W Avon, MA 21 448
Thackeray, James W Braintree, MA 102 1785

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