Wiring repair apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 13, 2008
Grant Date -
Mar 24, 2005
app pub date -
Sep 15, 2004
filing date -
Sep 24, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wiring repair apparatus includes an XY stage on which a substrate is placed, a laser source unit disposed above the XY stage, first and second gas windows disposed between the laser source unit and the XY stage, and first and second CVD gas units. The laser source unit emits a laser beam to a part of the substrate to be repaired. This laser beam passes through either the first or second gas window. The first CVD gas unit supplies an Al source gas (DMAH gas) to the first gas window while the second CVD gas unit supplies a Cr source gas (Cr(CO).sub.6 gas) to the second gas window.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully