Probes for use in scanning probe microscopes and methods of fabricating such probes
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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May 13, 2008
Grant Date -
Dec 22, 2005
app pub date -
Jun 21, 2004
filing date -
Jun 21, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Probes for use in a scanning probe microscope and methods of manufacturing such probes. Each probe includes a probe tip having a substantially vertical sidewall formed by an anisotropic etching process and a flared post underlying the probe tip that is formed by an etching process that is not anisotropic. A source gas comprising a bromine-containing gas and an oxygen-containing gas is used to etch the probe tip and flared post of the probe in a batch process. The probe tips may be qualified using any suitable criterion for use by a customer in an atomic force microscope without individual inspection.
First Claim
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Family
- No Family data available.
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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BRUKER NANO INC | 112 ROBIN HILL ROAD SANTA BARBARA CA 93117 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Chand, Ami | Goleta, CA | 17 | 167 |
# of filed Patents : 17 Total Citations : 167 | |||
Okulan, Nihat | Santa Barbara, CA | 8 | 89 |
# of filed Patents : 8 Total Citations : 89 |
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Patent Citation Ranking
- 4 Citation Count
- G01B Class
- 3.18 % this patent is cited more than
- 17 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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May 09, 2017 | I | Issuance | |
Apr 19, 2017 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Jun 26, 2014 | P | Published | |
Jan 29, 2014 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:CADET, MAMONJY;CRETIER, ANNETTE;SAINT-LU, CHARLOTTE;SIGNING DATES FROM 20131231 TO 20140122;REEL/FRAME:032078/0208 Owner name: SATISLOH AG, SWITZERLAND |
Jun 28, 2012 | F | Filing | |
Jul 22, 2011 | PD | Priority Date |

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