Probes for use in scanning probe microscopes and methods of fabricating such probes

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7370515
APP PUB NO 20050279729A1
SERIAL NO

10873064

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Abstract

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Probes for use in a scanning probe microscope and methods of manufacturing such probes. Each probe includes a probe tip having a substantially vertical sidewall formed by an anisotropic etching process and a flared post underlying the probe tip that is formed by an etching process that is not anisotropic. A source gas comprising a bromine-containing gas and an oxygen-containing gas is used to etch the probe tip and flared post of the probe in a batch process. The probe tips may be qualified using any suitable criterion for use by a customer in an atomic force microscope without individual inspection.

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Patent Owner(s)

Patent OwnerAddress
BRUKER NANO INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

International Classification(s)

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Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances200420052006200720082009201020112012201320140255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chand, Ami Goleta, CA 17 167
Okulan, Nihat Santa Barbara, CA 8 89

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  • 4 Citation Count
  • G01B Class
  • 3.18 % this patent is cited more than
  • 17 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges24385163822727898531401 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0255075100125150175200225250275300325350375400425

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