Apparatus and method for capacitive measurement of materials
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United States of America Patent
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May 6, 2008
Grant Date -
Jul 13, 2006
app pub date -
Jan 9, 2006
filing date -
Jan 13, 2005
priority date (Note) -
Expired
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Abstract
Method for measuring thicknesses of a film, a foil or a material layer with a measuring head which is spaced away from the film and with which a capacitive thickness measurement is performed, in which an optical distance measurement is performed with a distance measuring device and a distance determined by the optical distance measurement is used in determining the film thickness in the capacitive thickness measurement.
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