Acoustic resonator performance enhancement using filled recessed region
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United States of America Patent
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May 6, 2008
Grant Date -
Oct 12, 2006
app pub date -
Apr 6, 2005
filing date -
Apr 6, 2005
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Abstract
An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The fill region is in one of the first and second electrodes.
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