Acoustic resonator performance enhancement using filled recessed region

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United States of America Patent

PATENT NO 7369013
APP PUB NO 20060226932A1
SERIAL NO

11100311

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Abstract

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An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The fill region is in one of the first and second electrodes.

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AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE LIMITED1 YISHUN AVENUE 7 SINGAPORE 768923

International Classification(s)

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  • 2005 Application Filing Year
  • H03H Class
  • 508 Applications Filed
  • 302 Patents Issued To-Date
  • 59.45 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2005200620072008200920102011201220132014201520160255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fazzio, Ronald S Loveland, CO 10 788
Ruby, Richard C Menlo Park, CA 126 7330

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  • 74 Citation Count
  • H03H Class
  • 95.40 % this patent is cited more than
  • 17 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges47637181665412501 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 90100 +05101520253035404550556065707580

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