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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CARL ZEISS X-RAY MICROSCOPY INC	5300 CENTRAL PARKWAY DUBLIN CA 94568

International Classification(s)

• B02B:PREPARING GRAIN FOR MILLING; REFINING GRANULAR FRU....

• 2005 Application Filing Year
• B02B Class
• 28 Applications Filed
• 17 Patents Issued To-Date
• 60.72 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Feser, Michael	Walnut Creek, CA	35	794
# of filed Patents : 35 Total Citations : 794
Lyon, Alan	Berkeley, CA	5	125
# of filed Patents : 5 Total Citations : 125
Yun, Wenbing	Walnut Creek, CA	99	3901
# of filed Patents : 99 Total Citations : 3901

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Patent Citation Ranking

• 36 Citation Count
• B02B Class

• 93.33 % this patent is cited more than
• 17 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: 7365918

Fast x-ray lenses and fabrication method therefor

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Abstract

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A fabrication process for zone plate lenses is based on controlled thin layer deposition for fabricating structures as small as 2 nanometers (nm) in width, and potentially smaller. The substrate for deposition will take the form of a precision hole, fabricated in a substrate, such as silicon by electron beam lithography and subsequent reactive ion etching. A controlled layer deposition is then used to form the required zone plate structure. A subsequent thinning process is used to section the hole and produce a zone plate with the required layer thicknesses.

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Description

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Claims

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Claims data not available

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Legal Events

 

• STCH2016
• FP2016
• LAPS2016
• REMI2015
• FEPP2013
• AS2013
• FPAY2011
• I2008
• AS2005
• F2005
• PD2004

Date	Code	Event	Description
May 30, 2016	STCH	INFORMATION ON STATUS: PATENT DISCONTINUATION	free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362
Apr 29, 2016	FP	LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE	Effective Date: Apr 29, 2016
Apr 29, 2016	LAPS	LAPSE FOR FAILURE TO PAY MAINTENANCE FEES
Dec 11, 2015	REMI	MAINTENANCE FEE REMINDER MAILED
Dec 06, 2013	FEPP	FEE PAYMENT PROCEDURE	free format text: PAT HOLDER NO LONGER CLAIMS SMALL ENTITY STATUS, ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: STOL); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY
Jul 12, 2013	AS	ASSIGNMENT	free format text: MERGER;ASSIGNOR:XRADIA, INC.;REEL/FRAME:031938/0108 Owner name: CARL ZEISS X-RAY MICROSCOPY, INC., CALIFORNIA Effective Date: Jul 12, 2013
May 06, 2011	FPAY	FEE PAYMENT	year of fee payment: 4
Apr 29, 2008	I	Issuance
Aug 31, 2005	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:YUN, WENBING;FESER, MICHAEL;LYON, ALAN;REEL/FRAME:016807/0836 Owner name: XRADIA, INC., CALIFORNIA Effective Date: Aug 31, 2005
Aug 10, 2005	F	Filing
Aug 10, 2004	PD	Priority Date