Fast x-ray lenses and fabrication method therefor
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United States of America Patent
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Apr 29, 2008
Grant Date -
N/A
app pub date -
Aug 10, 2005
filing date -
Aug 10, 2004
priority date (Note) -
Expired
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Abstract
A fabrication process for zone plate lenses is based on controlled thin layer deposition for fabricating structures as small as 2 nanometers (nm) in width, and potentially smaller. The substrate for deposition will take the form of a precision hole, fabricated in a substrate, such as silicon by electron beam lithography and subsequent reactive ion etching. A controlled layer deposition is then used to form the required zone plate structure. A subsequent thinning process is used to section the hole and produce a zone plate with the required layer thicknesses.
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