Apparatus for judging target to be temperature-regulated
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United States of America Patent
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Apr 29, 2008
Grant Date -
Aug 31, 2006
app pub date -
Jul 29, 2005
filing date -
Jan 28, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Between a characteristic a of a process chamber 21a having a large pressure loss and a characteristic b of a process chamber 21b having a small pressure loss, threshold value A (flow rate value Q3, pressure value P3) is set on the characteristic a. The threshold value A is set on a controller 9. When a rotation speed of a pump 3 is increased by an electric motor 8, the flow rate of a fluid flowing through pipelines 1, 2 and a flow path of a process chamber 21 increases. At the time, the flow rate of the fluid is measured by a flowmeter 4 and a pressure of the fluid is measured by a pressure switch 5. If the pressure reaches the pressure value P3 when the flow rate of the fluid reaches the flow rate value Q3, the pressure switch 5 operates. At the time, the controller 9 judges that the process chamber 21a having a large pressure loss is connected to the pipelines 1, 2. Meanwhile, if the pressure does not reach the pressure value P3 when the flow rate of the fluid reaches the flow rate value Q3, the pressure switch 5 does not operate. At the time, the controller 9 judges that the process chamber 21b having a small pressure loss is connected to the pipelines 1, 2.
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