Surface plasmon optic devices and radiating surface plasmon sources for photolithography
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United States of America Patent
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Apr 15, 2008
Grant Date -
Mar 24, 2005
app pub date -
Nov 10, 2001
filing date -
Nov 10, 2001
priority date (Note) -
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Abstract
Disclosed is a surface plasmon optic device that has a periodic array of apertures in a dielectric substrate and a metal film formed on the dielectric substrate and emits light from metal-air interface. The surface plasmon optic device includes a surface plasmon generating apparatus, a surface plasmon detecting apparatus, a surface plasmon controlling apparatus, an etching apparatus, etc. if a metal diffraction grating is disposed on the metal film having a well-defined interface, propagation of the surface plasmon can be efficiently reflected, divided and controlled. Further, radiating surface plasmon having a half period of a lattice constant formed at air-metal (1, 0) can be preserved at a distance of at least a few micron.
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