Analyzing system for the detection of reducing and oxidizing gases in a carrier gas with a metal-oxide-semiconductor sensor arrangement
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United States of America Patent
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Apr 8, 2008
Grant Date -
Mar 9, 2006
app pub date -
Dec 23, 2003
filing date -
Jan 2, 2003
priority date (Note) -
Expired
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Abstract
Analyzing system for the detection of reducing and oxidizing gases in a carrier gas, wherein the detection means are sensors based on semiconductor-type metal oxides that work in the absence of oxygen. The system includes means for connecting to a chamber which contains the sensors, and moreover in that the processing and control include a system of real-time recognition of the gases, which provides a diagram in which the measurements taken on the carrier gas are situated and identified. The analyzing system permits analysis of the gas in real time.
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