Wire bonder
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United States of America Patent
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Apr 8, 2008
Issued Date -
N/A
app pub date -
Sep 29, 2005
filing date -
Sep 30, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A Wire Bonder contains a bondhead and a rocker arranged on the bondhead that is rotatable on a horizontal axis. A horn with a flange is attached to the rocker in which a capillary is clamped. At least one sensor is attached to the bondhead that detects vibrations of the bondhead and at least one actuator is arranged between the flange and the rocker that enables movement of the horn relative to the rocker. From an output signal delivered by the at least one sensor, a control device calculates a control signal for the at least one actuator and drives the at least one actuator in order to eliminate or at least reduce vibrations of the horn. The at least one sensor is preferably arranged on the rocker and is preferably an acceleration sensor.
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