Micro-oscillator, semiconductor device and communication apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 1, 2008
Grant Date -
Aug 3, 2006
app pub date -
Jan 30, 2006
filing date -
Feb 1, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A micro-oscillator is provided. In an example, the micro-oscillator applied to a signal filter and the like, ground capacitance thereof is reduced to control the loss of signal output. An oscillator element having a beam facing lower electrodes and to be electrostatically driven is formed on a substrate, and a wire width W1 of a DC bias feeder wire connected to the beam is formed to be narrower than a width of the beam.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully