Assembly for processing substrates
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United States of America Patent
Stats
-
Apr 1, 2008
Grant Date -
Mar 11, 2004
app pub date -
May 21, 2003
filing date -
May 21, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An assembly for processing substrates, which processing comprises a vacuum deposition process, such as, for instance, sputtering, CVD or PECVD, which vacuum deposition process is carried out in at least one process chamber, the assembly being provided with a conveying device for moving the substrates from a vacuum lock to a process chamber, the conveying device, which extends in a vacuum space, permitting a continuous conveyance of a substrate adjacent the at least one process chamber and permitting an intermittent conveyance adjacent at least the at least one vacuum lock.
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Cited Art Landscape
Patent Citation Ranking
- 3 Citation Count
- C23C Class
- 3.65 % this patent is cited more than
- 17 Age
