Scanning type probe microscope and probe moving control method therefor
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United States of America Patent
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Apr 1, 2008
Grant Date -
Dec 21, 2006
app pub date -
Aug 27, 2004
filing date -
Aug 27, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.
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