Probing card and inspection apparatus for microstructure
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United States of America Patent
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Mar 25, 2008
Grant Date -
Mar 29, 2007
app pub date -
Mar 31, 2006
filing date -
Mar 31, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A probing card and an inspection apparatus which precisely inspect a microstructure having a minute moving section by a simple method are provided. A probing card (6) has a speaker (2), and a circuit substrate (100) which fixes a probe (4), and the speaker (2) is disposed on the circuit substrate (100). The circuit substrate (100) is provided with an aperture region. As the speaker (2) is disposed on that region, a test sound wave is output to the moving section of the microstructure. The probe (4) detects a change in an electrical characteristic caused by the motion of the moving section according to the test sound wave, thereby inspecting the characteristic of the microstructure.
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