System and method for integrated data transfer, archiving and purging of semiconductor wafer data
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United States of America Patent
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Mar 18, 2008
Grant Date -
Jan 12, 2006
app pub date -
Jul 8, 2005
filing date -
Jul 9, 2004
priority date (Note) -
Expired
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Abstract
A system for the integrated archiving, restoring, purging, importing and exporting of semiconductor wafer data, the system including a data acquisition system for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools, wafer inspection tools, and wafer nanotopography tools, a buffer system for providing temporary storage for scan data transmitted over a network from the data acquisition system and for providing fault tolerance, a server system for providing storage for the scan data transmitted from the buffer system and converting the scan data into a format used by and stored in a database management system; and an analysis system client station including a display and communicating with the server system over the network, the analysis system and the server system managing the purging, archiving, restoring, importing and exporting of scan data.
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