Method for noise improvement in ellipsometers
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United States of America Patent
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Mar 11, 2008
Grant Date -
Jun 22, 2006
app pub date -
Nov 28, 2005
filing date -
Dec 3, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A normalization procedure for an ellipsometric system having a rotating optical element such as a polarizer or compensator is disclosed. In operation, a first DC component is extracted from the measured output signals obtained during the first 180 degrees of rotation of the optical element and a second DC component is extracted from the output signals obtained during the second 180 degrees of rotation of the optical element. The first DC component is used to normalize the output signals obtained during the first 180 degrees of rotation of the optical element and the second DC component is used to normalize the output signals obtained during the second 180 degrees of rotation of the optical element.
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