High flux, high energy photon source
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United States of America Patent
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Mar 4, 2008
Grant Date -
Jan 26, 2006
app pub date -
Nov 7, 2003
filing date -
May 8, 2001
priority date (Note) -
Expired
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Abstract
A high energy photon source for generating EUV radiation comprises a nozzle emitting a supersonic stream of source material, a laser or electrical/magnetic pre-ionization mechanism and a laser or electrical/magnetic excitation mechanism and a skimmer plate between them providing a collimated high density beam of source material for excitation.
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