Fabrication of narrow-band thin-film optical filters
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United States of America Patent
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Feb 19, 2008
Grant Date -
Aug 18, 2005
app pub date -
Feb 11, 2005
filing date -
Feb 13, 2004
priority date (Note) -
Expired
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Abstract
A multi-layer thin-film narrow-band filter is fabricated by a process wherein each half of a symmetric stack is deposited under exact conditions, either successively or contemporaneously. The two halves of the filter structure are then combined and bonded together using a wet bonding process that remains reversible for a period of time sufficient for testing the filter and, if necessary, for separating the two halves to regain access to the spacer layer. Accordingly, the spacer layer may be adjusted to shift the peak wavelength, if necessary, to the precise design specifications for a particular application. After correction, the components of the symmetric filter are bonded again using the same wet process.
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