Integrated visual imaging and electronic sensing inspection systems

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United States of America Patent

PATENT NO 7330583
APP PUB NO 20040032280A1
SERIAL NO

10223288

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Integrated inspection and test systems for liquid crystal display (LCD) active plates. The integrated inspection and test systems may combine visual imaging inspection and an electronic sensing such as voltage imaging, electron beam sensing or charge sensing, in which the potential defect information obtained by the visual inspection system is combined with the potential defect information obtained by the electronic sensing system to produce a defect report. One or more high-resolution visual cameras are scanned over a stationary plate, and the image data from the camera(s) is processed to detect potential defects. A high-resolution electronic sensing system examines the stationary plate, and the image data from the sensor(s) is processed to detect potential defects. The potential defects from the visual image data and electronic sensing image data are processed to produce the final defect information.

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Patent Owner(s)

  • PHOTON DYNAMICS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clark, Bernard T Los Gatos, CA 2 199
Freeman, David L Los Gatos, CA 16 804
Hawthorne, Jeffrey A Unionville, CA 7 270
Nagy, Alexander J Santa Cruz, CA 2 9
Pratt, William K Los Altos, CA 13 311

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