Evacuating valve
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 12, 2008
Grant Date -
Jan 13, 2005
app pub date -
Jul 7, 2004
filing date -
Jul 9, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An evacuating valve includes a chamber port structure to be connected to a vacuum vessel in which a plasma is produce to create a plasma atmosphere, a pump port structure to be connected to a vacuum pump; a valve casing defining a passage connecting the chamber port structure and the pump port structure, and a valve mechanism for opening and closing the chamber port structure. At least two expended parts are formed by expanding an end part of the inside surface of the chamber port structure, and the valve element has a large part capable of being pressed against the valve seat with the sealing member held between the large part and the valve seat, and at least two small parts capable of being fitted in the expanded parts of the chamber port structure.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully