Conductivity sensor and manufacturing method therefor
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United States of America Patent
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Jan 29, 2008
Grant Date -
Oct 5, 2006
app pub date -
Mar 30, 2006
filing date -
Apr 1, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A contacting-type conductivity sensor includes a plurality of electrodes disposed on a distal surface of a substrate. The substrate includes a plurality of vias through which electrical interconnection to the electrodes is accomplished. The conductivity sensor can employ two or four electrodes and may have a temperature sensitive element disposed on the distal surface. The electrodes may be patterned or otherwise deposited using semiconductor processing techniques.
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