Process for precise arrangement of micro-bodies
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United States of America Patent
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Jan 29, 2008
Grant Date -
Oct 19, 2006
app pub date -
Feb 9, 2006
filing date -
Dec 1, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process for arranging a number of micro-bodies efficiently and precisely as one on one spot on a substrate.Charged spots are formed by a converging ion beam or the like on a substrate having an insulating property or the like, and micro-bodies having a size of 200 microns or less are attracted and stuck to the charged spots.
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